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Properties of niobium nitride coatings deposited by cathodic arc physical vapor deposition

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dc.contributor.authorCansever, N.
dc.date.accessioned2026-06-27T13:00:14Z
dc.date.issued2007
dc.description.abstractThin films of mobium nitride were deposited on high speed steel substrate by cathodic arc physical vapor deposition using -150 V, -200 V and -250 V bias voltages at 1 Pa nitrogen pressure. X-ray diffraction data showed that hexagonal delta-niobium nitride was formed for all bias voltages. Fracture cross-sections revealed the existence of the transition zone structure in all coatings. The maximum hardness was found to be 39 GPa. The Rockwell C adhesion and the scratch test were used to compare adhesion properties. In Rockwell adhesion test the best adhesion was obtained at -150 V bias voltage and in scratch test the cracks were occurred approximately at 3-5 Ns. (c) 2006 Elsevier B.V. All rights reserved.en
dc.description.urihttps://doi.org/10.1016/j.tsf.2006.10.133
dc.identifier.doi10.1016/j.tsf.2006.10.133
dc.identifier.endpage3674
dc.identifier.issn0040-6090
dc.identifier.issue7-8
dc.identifier.startpage3670
dc.identifier.urihttps://hdl.handle.net/20.500.14981/48841
dc.identifier.volume515
dc.identifier.wos000244825100057
dc.language.isoeng
dc.publisherELSEVIER SCIENCE SA
dc.relation.ispartofTHIN SOLID FILMS
dc.subjectniobium nitride
dc.subjectcathodic arc physical vapor deposition
dc.subjectmicrostructure
dc.subjectmechanical properties
dc.subjecthardness
dc.subjectadhesion
dc.subjectNBN THIN-FILMS
dc.subjectBEAM-ASSISTED DEPOSITION
dc.subjectMECHANICAL-PROPERTIES
dc.subjectVACUUM
dc.subjectMaterials Science
dc.subjectPhysics
dc.titleProperties of niobium nitride coatings deposited by cathodic arc physical vapor deposition
dc.typeArticle
dspace.entity.typePublication
local.import.sourceWOS

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