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Cobalt-titanium multilayer thin films: Effect of thickness of titanium spacer layer on impedance properties

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dc.contributor.authorSenturk, E.
dc.contributor.authorErkovan, M.
dc.contributor.authorOkutan, M.
dc.contributor.authorKosemen, A.
dc.contributor.authorOzturk, S.
dc.contributor.authorSahin, Y.
dc.date.accessioned2026-06-27T13:38:47Z
dc.date.issued2015
dc.description.abstractWe investigated the impedance parameters of cobalt titanium (Co-Ti) multilayer thin films deposited on native oxidized Si (100) substrate under ultra-high vacuum (4 x 10(-8) mbar) by magnetron sputtering at room temperature. Electrical properties of Co/Ti/Co multilayer films were analyzed depending on the thickness of Ti spacer layer with the impedance spectroscopy as a function of frequency. Co/Ti multilayer films exhibited dielectric relaxation in both real and imaginary part of dielectric constants at the kilohertz frequency region and piezoelectric properties at the megahertz frequency region. We determined that the fabricated multilayer films have complex and super imposed type behavior when DC conductivity is used at lower frequency, resonance event and relaxation properties. (C) 2014 Elsevier Ltd. All rights reserved.en
dc.description.urihttps://doi.org/10.1016/j.mssp.2014.10.053
dc.identifier.doi10.1016/j.mssp.2014.10.053
dc.identifier.eissn1873-4081
dc.identifier.endpage485
dc.identifier.issn1369-8001
dc.identifier.startpage482
dc.identifier.urihttps://hdl.handle.net/20.500.14981/54127
dc.identifier.volume30
dc.identifier.wos000347266900067
dc.language.isoeng
dc.publisherELSEVIER SCI LTD
dc.relation.ispartofMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
dc.subjectMultilayer thin films
dc.subjectPiezoelectric
dc.subjectImpedance spectroscopy
dc.subjectDielectric properties
dc.subjectPIEZOELECTRIC RESONANCE
dc.subjectMAGNETORESISTANCE
dc.subjectDEPENDENCE
dc.subjectEngineering
dc.subjectMaterials Science
dc.subjectPhysics
dc.titleCobalt-titanium multilayer thin films: Effect of thickness of titanium spacer layer on impedance properties
dc.typeArticle
dspace.entity.typePublication
local.import.sourceWOS

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